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Chemical Vapor Deposition

For more than 40 years, Centorr Vacuum Industries (CVI) has been providing high performance furnaces for advanced material processing. Today, we continue to pioneer new frontiers with sophisticated thermal processing technology to meet dynamic industry demand for high performance materials.

Large scale, high temperature furnacing for carbons and coatings are a single example of CVI's skill and expertise. Graphitization, Chemical Vapor Infiltration (CVI) and Chemical Vapor Deposition (CVD) are a few of the applications. Graphite hot zones up to 3000°C are configured with inductive and resistance style heating. Operation at atmospheric pressure and partial vacuum conditions are typical.
  • Managed insulation degradation
  • Tight thermal zoning strategies
  • Application specific retort designs
  • Gas flow directioning expertise
  • Gas management technologies
  • Condensation, destruction and scrubbing expertise
  • Pumping System knowhow
The result is excellent system repeatability within target process windows in today's production environment. Pictured here is an example of a typical large scale custom system. This tandem system inductively heats graphite parts to temperatures in the 2800°C range. The systems utilize insulation composites and susceptor designs that allow processing for chemical vapor infiltration (CVI), graphitization, annealing and general chemical processing.

Systems are available in a wide variety of sizes ranging from laboratory systems (3"d X 8"h) to production systems that can be as large as 80"d X 120"h. Custom continuous graphitizers using our belt furnace technology are also available. Contact us to discuss your application further.



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The page last updated on Friday, January 9, 2004